Dual-phase interferometry for charge modulation mapping in ICS
US9983260B2 · kind B2 · utility
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32Claims
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Key dates
| Filing date | Oct 11, 2013 |
| Grant date | May 29, 2018 |
| Priority date | — |
| Expiry date | Dec 31, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/1719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dual-phase interferometric method and device for charge modulation mapping in integrated circuits provides significant improvement in signal to noise ratio over conventional detection configurations. The method and device can be used for failure analysis and testing of advanced technology IC chips for which high sensitivity in modulation mapping is required.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.