Vertical inductor and method of manufacturing the same
US9984819B2 · kind B2 · utility
0Cited by
4References
15Claims
0Family size
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Key dates
| Filing date | Apr 15, 2015 |
| Grant date | May 29, 2018 |
| Priority date | — |
| Expiry date | Oct 21, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01F2017/002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A spiral inductor formed in a vertical plane relative to a planar surface of a substrate includes a plurality of through holes disposed in the vertical plane and spaced apart from each other, a metal interconnect structure on the top surface, and a redistribution layer on the bottom surface and having at least one bottom metal layer. The metal interconnect structure and the redistribution layer are connected to each other through the plurality of through holes to form the vertical spiral inductor. The thus formed vertical spiral inductor has a significantly reduced surface area comparing with lateral spiral inductors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.