Microscopy support structures
US9984850B2 · kind B2 · utility
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26References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2016 |
| Grant date | May 29, 2018 |
| Priority date | — |
| Expiry date | Feb 23, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2802
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Electron microscope support structures and methods of making and using same. The support structures are generally constructed using semiconductor materials and semiconductor manufacturing processes. The temperature of the support structure may be controlled and/or gases or liquids may be confined in the observation region for reactions and/or imaging.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.