Semiconductor device including capacitor
US9985033B2 · kind B2 · utility
1Cited by
22References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 4, 2017 |
| Grant date | May 29, 2018 |
| Priority date | — |
| Expiry date | Jan 4, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/519
Abstract
A semiconductor device including a capacitor is provided. The semiconductor device includes lower electrodes, each of which includes a first electrode and a second electrode stacked in a first direction. The second electrode has a pillar shape that has a bar-type cross section having a longitudinal axis when viewed from a cross-sectional view taken along a plane defined by second and third directions perpendicular to the first direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.