Manufacturing method of electrode and display device including the electrode
US9985254B2 · kind B2 · utility
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6References
18Claims
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Key dates
| Filing date | Nov 15, 2016 |
| Grant date | May 29, 2018 |
| Priority date | — |
| Expiry date | Nov 15, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K2102/351
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A manufacturing method of a display device is provided. The manufacturing method includes: forming a first electrode over a substrate; forming an organic layer over the first electrode; and forming a second electrode over the organic layer by sputtering a target including a conductive oxide with a light-transmitting property. A mask is arranged between the organic layer and the target when the second electrode is formed. The mask has periodically arranged through holes with a maximum width equal to or larger than 0.1 μm and equal to or smaller than 3 μm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.