Ultrasonic sensor
US9987663B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 9, 2015 |
| Grant date | Jun 5, 2018 |
| Priority date | — |
| Expiry date | May 22, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG10K11/002
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An ultrasonic sensor includes a substrate on which an opening portion is formed; a vibration plate that is provided on the substrate so as to block the opening portion; and a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode that are stacked on an opposite side of the opening portion of the vibration plate, in which when a direction in which the first electrode, the piezoelectric layer, and the second electrode are stacked is set to be a Z direction, and a portion that is completely overlapped by the first electrode, the piezoelectric layer, and the second electrode in the Z direction is set to be an active portion, the plural active portions are provided so as to face the one opening portion, and a suppressing portion (column portion) that suppresses vibrations of the vibration plate is provided between the adjacent active portions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.