Patent · US Active

Multilevel pressure sensor

US9989431B2 · kind B2 · utility

0Cited by

3References

12Claims

0Family size

Assignee

ENDRESS+HAUSER GMBH+CO.KG · DE

Inventors

Andreas Rossberg · Bad Säckingen, DE
Olaf Textor · Bad Kötzting, DE
Elmar Wosnitza · Glückstadt, DE

Key dates

Filing date	Nov 14, 2014
Grant date	Jun 5, 2018
Priority date	—
Expiry date	Jan 18, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG01L9/0051
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A pressure sensor comprises a deformable measuring diaphragm, and a mating body connected in a pressure-tight manner and forms a measuring chamber in which a reference pressure is present. A pressure can be applied to an outside of the measuring diaphragm. The pressure sensor has a capacitive transducer having at least one mating body electrode and at least one diaphragm electrode. Above a pressure limit value for the pressure, at least one central surface section of the measuring diaphragm rests against the mating body with a contact surface area, the size of which is dependent on the pressure. The pressure sensor also has a resistive transducer for converting a pressure-dependent deformation of the measuring diaphragm, when pressed in a range of values above the pressure limit value, into an electrical signal using an electrical resistance which is dependent on the contact surface area of the measuring diaphragm on the mating body.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.