Electromechanical device

US9991076B2 · kind B2 · utility

Assignee

• Massachusetts Institute of Technology · US

Inventors

• Vladimir Bulovic · Lexington, US
• Jeffrey H. Lang · Sudbury, US
• Hae-Seung Lee · Bedford, US
• Timothy M. Swager · Newton, US
• Trisha L. Andrew · Cambridge, US
• Matthew Eric D'Asaro · Cambridge, US
• Parag Deotare · Ann Arbor, US
• Apoorva Murarka · Cambridge, US
• Farnaz Niroui · Schreiber, CA
• Ellen May Sletten · Los Angeles, US
• Annie I-Jen Wang · Cambridge, US

Key dates

• Filing date: Jan 28, 2014
• Grant date: Jun 5, 2018
• Expiry date: Nov 8, 2034

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T156/10
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

Electromechanical devices described herein may employ tunneling phenomena to function as low-voltage switches. Opposing electrodes may be separated by an elastically deformable layer which, in some cases, may be made up of a non-electrically conductive material. In some embodiments, the elastically deformable layer is substantially free of electrically conductive material. When a sufficient actuation voltage and/or force is applied, the electrodes are brought toward one another and, accordingly, the elastically deformable layer is compressed. Though, the elastically deformable layer prevents the electrodes from making direct contact with one another. Rather, when the electrodes are close enough to one another, a tunneling current arises therebetween. The elastically deformable layer may exhibit spring-like behavior such that, upon release of the actuation voltage and/or force, the separation distance between electrodes is restored. Thus, the electromechanical device may be actuated between open and closed switch positions.