Patent · US Active

Filament holder for hot cathode PECVD source

US9991099B2 · kind B2 · utility

1Cited by

9References

15Claims

0Family size

Assignee

Seagate Technology LLC · US

Inventors

Samuel Lewis Tanaka · San Leandro, US
Christopher L. Platt · Erie, US
Thomas Larson Greenberg · Berkeley, US

Key dates

Filing date	Nov 12, 2015
Grant date	Jun 5, 2018
Priority date	—
Expiry date	Jul 5, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/3321
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A chemical vapor deposition source that includes at least one plate to which first and second electrical connection posts are coupled. The chemical vapor deposition source also includes a filament having a first end and a second end. The first end of the filament is electrically connected to the first electrical connection post and the second end of the filament is electrically connected to the second electrical connection post. The chemical vapor deposition source further includes at least one filament holder electrically insulated from the at least one plate. The at least one filament holder holds a portion of the filament between the first end and the second end.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.