Laser light source device and inspection device
US9991670B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 19, 2015 |
| Grant date | Jun 5, 2018 |
| Priority date | — |
| Expiry date | Mar 26, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/1618
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A laser light source device having a simple configuration and an inspection device are provided. A laser light source device 200 according to an exemplary embodiment in accordance with the present invention has a repetition frequency of 1 MHz or higher, and includes fundamental wave generation means 201 for oscillating laser light including a fundamental wave with its center wavelength being included in one of first to fourth wavelength bands, and means 205 for generating a sixth harmonic of pulsed laser light extracted from the fundamental wave generation means 201. The first wavelength band is 1064.326 nm to 1064.511 nm. The second wavelength band is 1064.757 nm to 1064.852 nm. The third wavelength band is 1063.805 nm to 1063.878 nm. Further, the fourth wavelength band is 1063.962 nm to 1064.031 nm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.