Patent · US Active

Microacoustic component and method for the production thereof

US9991873B2 · kind B2 · utility

1Cited by
4References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 20, 2014
Grant dateJun 5, 2018
Priority date
Expiry dateJan 26, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH03H9/0542
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

A microacoustic component includes a functional acoustic region, an inner marginal region and an outer marginal region. The cover covers the functional acoustic region and has a thin film and a bearing surface. The inner marginal region is acoustically coupled to the functional acoustic region and the bearing surface bears directly at least on a part of the inner marginal region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.