Microacoustic component and method for the production thereof
US9991873B2 · kind B2 · utility
1Cited by
4References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 20, 2014 |
| Grant date | Jun 5, 2018 |
| Priority date | — |
| Expiry date | Jan 26, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/0542
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A microacoustic component includes a functional acoustic region, an inner marginal region and an outer marginal region. The cover covers the functional acoustic region and has a thin film and a bearing surface. The inner marginal region is acoustically coupled to the functional acoustic region and the bearing surface bears directly at least on a part of the inner marginal region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.