Systems and methods for MEMS gyroscope shock robustness
US9995583B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 4, 2014 |
| Grant date | Jun 12, 2018 |
| Priority date | — |
| Expiry date | May 18, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5769
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Various embodiments of the invention allow for increased shock robustness in gyroscopes. In certain embodiments, immunity against undesired forces that corrupt signal output is provided by a chessboard-pattern architecture of proof masses that provides a second layer of differential signals not present in existing designs. Masses are aligned parallel to each other in a two-by-two configuration with two orthogonal symmetry axes. The masses are driven to oscillate in such a way that each mass moves anti-parallel to an adjacent proof mass. In some embodiments of the invention, a mechanical joint system interconnects proof masses to suppress displacements due to mechanical disturbances, while permitting displacements due to Coriolis forces to prevented erroneous sensor signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.