Fiber-optic temperature and flow sensor system and methods
US9995628B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 16, 2016 |
| Grant date | Jun 12, 2018 |
| Priority date | — |
| Expiry date | May 16, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/29359
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A fiber optic sensor, a process for utilizing a fiber optic sensor, and a process for fabricating a fiber optic sensor are described, where a double-side-polished silicon pillar is attached to an optical fiber tip and forms a Fabry-Pérot cavity. In an implementation, a fiber optic sensor in accordance with an exemplary embodiment includes an optical fiber configured to be coupled to a light source and a spectrometer; and a single silicon layer or multiple silicon layers disposed on an end face of the optical fiber, where each of the silicon layer(s) defines a Fabry-Pérot interferometer, and where the sensor head reflects light from the light source to the spectrometer. In some implementations, the fiber optic sensor may include the light source coupled to the optical fiber; a spectrometer coupled to the optical fiber; and a controller coupled to the high speed spectrometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.