Method for operating a pulsed arc source
US9997338B2 · kind B2 · utility
1Cited by
14References
36Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 8, 2005 |
| Grant date | Jun 12, 2018 |
| Priority date | — |
| Expiry date | Aug 24, 2029 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF05D2230/313
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
This invention relates to an arc-based method for the deposition of insulating layers and to an arc-based method for low-temperature coating processes, in which an electric arc discharge, ignited and applied on the surface of a target in an arc source, is simultaneously fed a direct current and a pulsed or alternating current.The invention further relates to an arc source in which the target is connected to a power supply unit that encompasses either a minimum of one pulsed high-current power supply 18, 18′ and an additional power supply 13′, 18″, or a power supply 21, 21′, 22 designed with switchable combinatorial circuitry.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.