Electron spectrometer
US9997346B1 · kind B1 · utility
1Cited by
2References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 30, 2017 |
| Grant date | Jun 12, 2018 |
| Priority date | — |
| Expiry date | Jun 30, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/32
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle spectrometer of hemispherical analyzer type for analyzing a particle emitting sample, the spectrometer comprising at least a first mechanism configured to move at least a part of the lens with respect to the axis between the sample spot and the analyzer entrance in a coordinate direction synchronously with a deflection of the particle beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.