Methods for transporting wafers between wafer holders and chambers
US9997384B2 · kind B2 · utility
1Cited by
27References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2011 |
| Grant date | Jun 12, 2018 |
| Priority date | — |
| Expiry date | Oct 7, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67201
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus comprises a process chamber, and a loadlock connected to the process chamber. The loadlock is configured to have a wafer holder disposed therein. The wafer holder is configured to store a plurality of wafers, and is configured to transport the plurality of wafers away from the loadlock.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.