300 mm microenvironment pod with door on side
USD378873S · kind S · design
13Cited by
58References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 13, 1995 |
| Grant date | Apr 22, 1997 |
| Priority date | — |
| Expiry date | Apr 22, 2011 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.