Electrostatic chuck
USD609655S1 · kind S1 · design
573Cited by
6References
1Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 19, 2009 |
| Grant date | Feb 9, 2010 |
| Priority date | — |
| Expiry date | Feb 9, 2024 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.