Hexcell channel arrangement for use in a boat for a deposition apparatus
USD760180S1 · kind S1 · design
14Cited by
30References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 21, 2014 |
| Grant date | Jun 28, 2016 |
| Priority date | — |
| Expiry date | Jun 28, 2030 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.