Seal members for use in semiconductor production apparatuses
USD898171S1 · kind S1 · design
4Cited by
31References
1Claims
0Family size
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Key dates
| Filing date | Jun 7, 2018 |
| Grant date | Oct 6, 2020 |
| Priority date | — |
| Expiry date | Oct 6, 2035 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.