Scanning capacitance microscope
USRE32457E · kind E · reissue
44Cited by
11References
6Claims
0Family size
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Key dates
| Filing date | Dec 19, 1985 |
| Grant date | Jul 7, 1987 |
| Priority date | — |
| Expiry date | Dec 19, 2005 |
Classification
- Technology area (CPC —)General
Abstract
Variations in topography and material properties of the surface layer of a body are observed in microscopic imaging using a scanning capacitance probe. The acronym SCaM identifying the process and apparatus is derived from the phrase scanning capacitance microscope. The material properties observable by SCaM are the surface-electric property representative of the complex dielectric constant of the surface material and the surface-mechanical property representative of the elastic constant of the surface material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.