Method for controlling configuration of laser induced breakdown and ablation

USRE37585E1 · kind E1 · reissue

Assignee

• THE REGENTS OF THE UNIVERSITY OF MICHIGAN · US

Inventors

• Gerard Mourou · Rochester, US
• Detao Du · San Diego, US
• Subrata Dutta · New Delhi, IN
• Victor M. Elner · Ann Arbor, US
• Ron Kurtz · Oakville, CA
• Paul R. Lichter · Ann Arbor, US
• Xinbing Liu · Acton, US
• Peter P. Pronko · Kettering, US
• Jeffrey Squier · Golden, US

Key dates

• Filing date: Aug 4, 1999
• Grant date: Mar 19, 2002
• Expiry date: Aug 4, 2019

Classification

• Technology area (CPC —): General

Abstract

In one aspect the invention provides a method for laser induced breakdown of a material with a pulsed laser beam where the material is characterized by a relationship of fluence breakdown threshold (Fth) versus laser beam pulse width (T) that exhibits an abrupt, rapid, and distinct change or at least a clearly detectable and distinct change in slope at a predetermined laser pulse width value. The method comprises generating a beam of laser pulses in which each pulse has a pulse width equal to or less than the predetermined laser pulse width value. The beam is focused to a point at or beneath the surface of a material where laser induced breakdown is desired.The beam may be used in combination with a mask in the beam path. The beam or mask may be moved in the x, y, and Z directions to produce desired features. The technique can produce features smaller than the spot size and Rayleigh range due to enhanced damage threshold accuracy in the short pulse regime.