Method of manufacturing an ink jet recording head having reduced stress concentration near the boundaries of the pressure generating chambers
USRE39474E1 · kind E1 · reissue
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2002 |
| Grant date | Jan 23, 2007 |
| Priority date | — |
| Expiry date | Dec 16, 2022 |
Classification
- Technology area (CPC —)General
Abstract
An A method of manufacturing an ink-jet recording head comprising: which includes an elastic sheet providing facing pressure generating chambers; , nozzle orifices, each communicating with the pressure generating chambers; , and piezoelectric vibrators formed on the elastic sheet, each of the piezoelectric vibrators having, a lower electrode formed on the elastic sheet, the method including forming a piezoelectric layer formed on the lower electrode, and forming an upper electrode formed on the piezoelectric layer such that the upper electrode faces the respective pressure generating chamber, wherein the area where the lower electrode, piezoelectric layer and upper electrode overlap is located within an area defined by the pressure generating chamber in the longitudinal direction thereof. The upper electrodes of the piezoelectric vibrators are positioned independently of each other; and an electrical insulator layer having windows, wherein the electrical insulator layer covers is formed to cover the upper electrodes; , and a conductor pattern connecting with is connected to the upper electrodes via the windows of the electrical insulator layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.