Method of making fused silica by decomposing siloxanes
USRE39535E1 · kind E1 · reissue
2Cited by
15References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 7, 1997 |
| Grant date | Apr 3, 2007 |
| Priority date | — |
| Expiry date | Apr 7, 2017 |
Classification
- Technology area (CPC —)General
Abstract
This invention relates to the production of high purity fused silica glass through oxidation or flame hydrolysis of a vaporizable silicon-containing compound. More particularly, this invention is directed to the use of vaporizable, halide-free compounds in said production. In the preferred practice, a polymethylsiloxane comprises said vaporizable, halide-free compound.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.