Acid functional polymers based on benzocyclobutene
USRE40728E1 · kind E1 · reissue
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Key dates
| Filing date | Mar 24, 2004 |
| Grant date | Jun 9, 2009 |
| Priority date | — |
| Expiry date | Mar 24, 2024 |
Classification
- Technology area (CPC —)General
Abstract
The invention is a curable cyclobutarene based polymer comprising acid functional pendant groups. The cured polymer displays excellent qualities of toughness, adhesion, dielectric constant, and low stress. The preferred system is soluble in an aqueous base and can be used to generate patterned films with excellent resolution without the need to handle organic developer solvents.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.