Method and apparatus using a closed loop controlled actuator for surface profilometry
USRE41057E1 · kind E1 · reissue
Assignee
Inventors
Key dates
| Filing date | Apr 5, 2006 |
| Grant date | Dec 29, 2009 |
| Priority date | — |
| Expiry date | Apr 5, 2026 |
Classification
- Technology area (CPC —)General
Abstract
An apparatus for profiling the surface of a workpiece, including a probe adapted to make contact with the surface of a workpiece, a sensor for determining or deriving the force between the probe and the workpiece surface, an actuator that adjusts the position of the probe along an axis, which is generally perpendicular to the surface of the workpiece, in order to maintain a constant force between the probe and the surface, and a closed control loop, including a controller that controls the operation of the actuator based on information from the sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.