Patent · US Expired

Method and apparatus using a closed loop controlled actuator for surface profilometry

USRE41057E1 · kind E1 · reissue

1Cited by
8References
40Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 5, 2006
Grant dateDec 29, 2009
Priority date
Expiry dateApr 5, 2026

Classification

  • Technology area (CPC —)General

Abstract

An apparatus for profiling the surface of a workpiece, including a probe adapted to make contact with the surface of a workpiece, a sensor for determining or deriving the force between the probe and the workpiece surface, an actuator that adjusts the position of the probe along an axis, which is generally perpendicular to the surface of the workpiece, in order to maintain a constant force between the probe and the surface, and a closed control loop, including a controller that controls the operation of the actuator based on information from the sensor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.