Method of fabricating an imaging device for collecting photons
USRE44637E1 · kind E1 · reissue
1Cited by
21References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 15, 2010 |
| Grant date | Dec 10, 2013 |
| Priority date | — |
| Expiry date | Apr 15, 2030 |
Classification
- Technology area (CPC —)General
Abstract
A photon collector has a reflecting metal layer to increase photon collection efficiency in a solid state imaging sensor. The reflecting metal layer reflects incident light internally to a photosensor. A plurality of photon collectors is formed in a wafer substrate over an array of photosensors. The photon collector is formed in an opening in an insulating layer provided over each photosensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.