Method of manufacturing an ink jet recording head having piezoelectric element

USRE45057E1 · kind E1 · reissue

Assignee

• SEIKO EPSON CORPORATION · JP

Inventors

• Tsutomu Hashizume · Nagano, JP
• Tetsushi Takahashi · Nagano, JP

Key dates

• Filing date: Nov 9, 2012
• Grant date: Aug 5, 2014
• Expiry date: Nov 9, 2032

Classification

• Technology area (CPC —): General

Abstract

A method of manufacturing an ink jet recording head. The method includes providing a laminated structure in which a first electrode layer is located on a diaphragm, a piezoelectric layer is located on the first electrode layer, and a second electrode layer is located on the piezoelectric layer and etching the first electrode layer, the second electrode layer and the piezoelectric layer so that a portion of the diaphragm is exposed. In this method, at least the second electrode layer and the piezoelectric layer are etched simultaneously.