Surface acoustic wave device and method of fabricating the same
USRE45419E1 · kind E1 · reissue
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13References
22Claims
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Key dates
| Filing date | Nov 22, 2008 |
| Grant date | Mar 17, 2015 |
| Priority date | — |
| Expiry date | Nov 22, 2028 |
Classification
- Technology area (CPC —)General
Abstract
A surface acoustic wave device includes a piezoelectric substrate having a first surface on which comb-like electrodes, first pads connected thereto, and a first film are provided. The first film is located so as to surround the comb-like electrodes. A base substrate has a second surface on which second pads joined to the first pads and a second film joined to the first film are provided. The first and second films joined by a surface activation process define a cavity in which the comb-like electrodes and the first and second pads are hermetically sealed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.