Acoustic wave device
USRE47989E1 · kind E1 · reissue
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6References
41Claims
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Key dates
| Filing date | Jul 20, 2017 |
| Grant date | May 12, 2020 |
| Priority date | — |
| Expiry date | Jul 20, 2037 |
Classification
- Technology area (CPC —)General
Abstract
An acoustic wave device includes: a piezoelectric film made of an aluminum nitride film containing a divalent element and a tetravalent element, or a divalent element and a pentavalent element; and an electrode that excites an acoustic wave propagating through the piezoelectric film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.