Laser power and energy sensor utilizing anisotropic thermoelectric material

USRE48028E1 · kind E1 · reissue

Assignee

• Coherent, Inc. · US

Inventors

• Robert Semerad · St. Wolfgang, DE
• Erik Krous · Wilsonville, US
• James Schloss · Tigard, US

Key dates

• Filing date: May 5, 2016
• Grant date: Jun 2, 2020
• Expiry date: May 5, 2036

Classification

• Technology area (CPC —): General

Abstract

A laser-radiation sensor includes a copper substrate on which is grown an oriented polycrystalline buffer layer surmounted by an oriented polycrystalline sensor-element of an anisotropic transverse thermoelectric material. An absorber layer, thermally connected to the sensor-element, is heated by laser-radiation to be measured and communicates the heat to the sensor-element, causing a thermal gradient across the sensor-element. Spaced-apart electrodes in electrical contact with the sensor-element sense a voltage corresponding to the thermal gradient as a measure of the incident laser-radiation power.