Thin film diamond coating system and method
USRE50260E1 · kind E1 · reissue
0Cited by
5References
13Claims
0Family size
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Key dates
| Filing date | Aug 31, 2022 |
| Grant date | Jan 7, 2025 |
| Priority date | — |
| Expiry date | Aug 31, 2042 |
Classification
- Technology area (CPC —)General
Abstract
Disclosed herein is a transparent glass system that includes an optical grade silicon substrate, and a nanocrystalline diamond film on the silicon substrate, the diamond film deposited using a chemical vapor deposition system having a reactor in which methane, hydrogen and argon source gases are added. Further disclosed is a method of fabricating transparent glass that includes the steps of seeding an optical grade silicon substrate and forming a nanocrystalline diamond film on the silicon substrate using a chemical vapor deposition system having a reactor in which methane, hydrogen and argon source gases are added.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.