Thin layer deposition process
UST103203I4 · kind I4 · defensive publication
1Cited by
0References
8Claims
0Family size
Inventors
Key dates
| Filing date | Aug 16, 1982 |
| Grant date | Jul 5, 1983 |
| Priority date | — |
| Expiry date | Aug 16, 2002 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.