Apparatus for forming a vacuum evaporating layer on a substrate
UST988002I4 · kind I4 · defensive publication
2Cited by
0References
11Claims
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Inventor
Key dates
| Filing date | Aug 7, 1978 |
| Grant date | Nov 6, 1979 |
| Priority date | — |
| Expiry date | Aug 7, 1998 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.