Patent assignee · US · COMPANY

Angstrom Systems, Inc.

1Patents
0Active
1Granted
28Portfolio score

Filing activity: Mar 19, 2001 → Mar 19, 2001

Most-cited patents

PatentTitleAreaCited byStatus
US6416822B1 Continuous method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD) Electricity 298 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.