Angstrom Systems, Inc.
1Patents
0Active
1Granted
28Portfolio score
Filing activity: Mar 19, 2001 → Mar 19, 2001
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6416822B1 | Continuous method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD) | Electricity | 298 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.