ATT ADVANCED TEMPERATURE TEST SYSTEM GMBH
1Patents
1Active
1Granted
39Portfolio score
Filing activity: Jul 21, 2020 → Jul 21, 2020
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11821941B2 | Method for open-loop or closed-loop control of the temperature of a chuck for a wafer, temperature adjustment device, and wafer testing system | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.