Patent assignee · DE · COMPANY

ATT ADVANCED TEMPERATURE TEST SYSTEM GMBH

1Patents
1Active
1Granted
39Portfolio score

Filing activity: Jul 21, 2020 → Jul 21, 2020

Most-cited patents

PatentTitleAreaCited byStatus
US11821941B2 Method for open-loop or closed-loop control of the temperature of a chuck for a wafer, temperature adjustment device, and wafer testing system Electricity 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.