Axcelis Technology, Inc.
3Patents
2Active
3Granted
39Portfolio score
Filing activity: May 23, 2001 → Sep 30, 2016 · 1 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6834656B2 | Plasma process for removing polymer and residues from substrates | Electricity | 14 | Expired |
| US7385799B1 | Offset phase operation on a multiphase AC electrostatic clamp | Electricity | 3 | Active |
| US10186446B2 | Adjustable circumference electrostatic clamp | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.