Patent assignee · US · COMPANY

Chapman Instruments, Inc.

6Patents
0Active
6Granted
27Portfolio score

Filing activity: Aug 4, 1989 → Mar 24, 2006

Most-cited patents

PatentTitleAreaCited byStatus
US5017012A Viewing system for surface profiler Physics 30 Expired
US6342705B1 System for locating and measuring an index mark on an edge of a wafer Electricity 30 Expired
US6157450A Automated optical surface profile measurement system Physics 28 Expired
US5986753A Wafer holding and orienting fixture for optical profilometry Physics 18 Expired
US7283256B2 Method and apparatus for measuring wafer thickness Physics 2 Expired
US7280232B2 Method and apparatus for measuring wafer thickness Physics 2 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.