Patent assignee · JP · COMPANY

Crestec Corporation

5Patents
3Active
5Granted
34Portfolio score

Filing activity: Jul 21, 2004 → Feb 19, 2009 · 3 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US7522510B2 Electron beam applying apparatus and drawing apparatus Electricity 1 Expired
US8232711B2 Surface emission type electron source and drawing device Electricity 0 Active
US8158310B2 Aberration evaluation pattern, aberration evaluation method, aberration correction method, electron beam drawing apparatus, electron microscope, master, stamper, recording medium, and structure Emerging Cross-Sectional Technologies 0 Active
US7929396B2 Electron beam applying apparatus and drawing apparatus Electricity 0 Active
US6989536B2 Electron-beam writing device and electron-beam writing method Electricity 0 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.