EPILUVAC AB
2Patents
2Active
2Granted
41Portfolio score
Filing activity: Jan 29, 2013 → Apr 8, 2020
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10017877B2 | Silicon carbide crystal growth in a CVD reactor using chlorinated chemistry | Chemistry; Metallurgy | 0 | Active |
| US12180592B2 | Device and method for ensuring planarity of a semiconductor wafer during epitaxial growth | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.