EUV, L.L.C.
3Patents
0Active
3Granted
28Portfolio score
Filing activity: Jun 12, 1998 → Mar 12, 1999
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6118577A | Diffractive element in extreme-UV lithography condenser | Emerging Cross-Sectional Technologies | 40 | Expired |
| US6169652A | Electrostatically screened, voltage-controlled electrostatic chuck | Electricity | 25 | Expired |
| US6130431A | Monolithic pattern-sensitive detector | Electricity | 5 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.