Patent assignee · JP · INDIVIDUAL

Hiroshi Mase

1Patents
0Active
1Granted
22Portfolio score

Filing activity: Dec 26, 2003 → Dec 26, 2003

Most-cited patents

PatentTitleAreaCited byStatus
US7514377B2 Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device Electricity 18 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.