Hiroshi Mase
1Patents
0Active
1Granted
22Portfolio score
Filing activity: Dec 26, 2003 → Dec 26, 2003
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7514377B2 | Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device | Electricity | 18 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.