MEMSENSING MICROSYSTEMS TECHNOLOGY CO., LTD
5Patents
5Active
5Granted
45Portfolio score
Filing activity: Jun 10, 2010 → Jul 30, 2012 · 2 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7972888B1 | Methods for manufacturing MEMS sensor and thin film and cantilever beam thereof with epitaxial growth process | Physics | 12 | Active |
| US7998776B1 | Methods for manufacturing MEMS sensor and thin film thereof with improved etching process | Physics | 6 | Active |
| US8621941B2 | Feedback system for identifying movement and intensity of external force | Electricity | 3 | Active |
| US9221675B2 | Chip with integrated circuit and micro-silicon condenser microphone integrated on single substrate and method for making the same | Electricity | 1 | Active |
| US8482357B2 | Transverse acoustic wave resonator, oscillator having the resonator and method for making the resonator | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.