Patent assignee · KR · COMPANY

Nymtech, Co., Ltd.

1Patents
0Active
1Granted
21Portfolio score

Filing activity: Jun 27, 2001 → Jun 27, 2001

Most-cited patents

PatentTitleAreaCited byStatus
US6866784B2 Slurry recycling system and method for CMP apparatus Emerging Cross-Sectional Technologies 12 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.