Patent assignee · CA · COMPANY

Quantiscript, Inc.

3Patents
0Active
3Granted
27Portfolio score

Filing activity: Sep 17, 1998 → Apr 25, 2002

Most-cited patents

PatentTitleAreaCited byStatus
US6261938A Fabrication of sub-micron etch-resistant metal/semiconductor structures using resistless electron beam lithography Physics 30 Expired
US6897140B2 Fabrication of structures of metal/semiconductor compound by X-ray/EUV projection lithography Emerging Cross-Sectional Technologies 4 Expired
US6855646B2 Plasma polymerized electron beam resist Emerging Cross-Sectional Technologies 1 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.