Patent assignee · KR · COMPANY

SEM Technology, Co., Ltd.

2Patents
0Active
2Granted
26Portfolio score

Filing activity: Apr 28, 2001 → Nov 27, 2004

Most-cited patents

PatentTitleAreaCited byStatus
US6935269B2 Apparatus for treating the surface with neutral particle beams Electricity 692 Expired
US7381943B2 Neutral particle beam processing apparatus Electricity 4 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.