SEM Technology, Co., Ltd.
2Patents
0Active
2Granted
26Portfolio score
Filing activity: Apr 28, 2001 → Nov 27, 2004
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6935269B2 | Apparatus for treating the surface with neutral particle beams | Electricity | 692 | Expired |
| US7381943B2 | Neutral particle beam processing apparatus | Electricity | 4 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.