Apparatus for treating the surface with neutral particle beams
US6935269B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Apr 28, 2001 |
| Grant date | Aug 30, 2005 |
| Priority date | — |
| Expiry date | Jan 1, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32357
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention relates to an apparatus for treating the surface with neutral particle beams comprising an antenna container, a plasma generating part, a neutral particle beam generating part and a treating part, wherein the antenna container comprises antennas connected to high frequency electric power supply through which high frequency electric power supplies, the plasma generating part transfers gases from a gas injector into plasmas with the supplied power, the neutral particle beam generating part reverts the obtained plasmas to neutral particle beams via the collision thereof with metal plates, and the treating part treats the surface of a target with the neutral particle beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.