Semiconductor Equipment Technology
6Patents
0Active
6Granted
23Portfolio score
Filing activity: Jan 27, 1998 → Sep 29, 1999
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6186880A | Recyclable retaining ring assembly for a chemical mechanical polishing apparatus | Performing Operations; Transporting | 28 | Expired |
| USD401252S | Shield and cover for target of sputter coating apparatus | General | 26 | Expired |
| USD403334S | Shield and cover for target of sputter coating apparatus | General | 21 | Expired |
| USD403002S | Shield and cover for target of sputter coating apparatus | General | 20 | Expired |
| USD401250S | Shield and cover for target of sputter coating apparatus | General | 13 | Expired |
| USD401251S | Shield and cover for target of sputter coating apparatus | General | 10 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.