Shield and cover for target of sputter coating apparatus
USD401251S · kind S · design
10Cited by
1References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 27, 1998 |
| Grant date | Nov 17, 1998 |
| Priority date | — |
| Expiry date | Nov 17, 2012 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.