Set, Tosoh
1Patents
0Active
1Granted
21Portfolio score
Filing activity: Aug 19, 2002 → Aug 19, 2002
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6780294B1 | Shield assembly for substrate processing chamber | Chemistry; Metallurgy | 11 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.