Patent assignee · US · COMPANY

Set, Tosoh

1Patents
0Active
1Granted
21Portfolio score

Filing activity: Aug 19, 2002 → Aug 19, 2002

Most-cited patents

PatentTitleAreaCited byStatus
US6780294B1 Shield assembly for substrate processing chamber Chemistry; Metallurgy 11 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.